Mass Flow Controller (MFC) is a high-precision gas flow control device widely used in semiconductor, chemical, medical and scientific research fields. The following are its core functions and features:
1. Core Function
Precise flow control
Real-time adjustment of gas flow, accuracy can reach ±0.5%~±1.5% (±0.2% for high-end models)
Typical control range: 0.1 sccm~500 slm (standard milliliters/minute)
Closed-loop automatic adjustment
Dynamic compensation of pressure/temperature fluctuations through PID algorithm
Response time <1 second (fast response type <100ms)
2. Technical Features
Three-in-one architecture
Sensor (thermal/differential pressure) + control valve (electromagnetic/piezoelectric) + microprocessor
Integrated temperature/pressure compensation function
Multi-protocol communication
Standard analog signal (0-5V/4-20mA)
Support digital protocols: RS485/DeviceNet/Ethernet