The micro thermal flow meter is a high-precision flow measurement instrument based on the principle of thermal diffusion, designed for precise control of micro gas flow (usually 0.1 sccm~20 slm).
KMFM50 series micro thermal flowmeter
KMFM50 series micro thermal flowmeter
◆Medium: clean, dry and non-corrosive gas
Range: 0~20,100,300,500SCCM, 0~1,2,3,5,10,50,100,200,500,800
SLM
Accuracy: 1% of reading error or 0.8% of full scale error
Range ratio: 1:100
Flow pressure loss: ≤100Pa (specific range related)
Response time: ≤0.7S
Repeat accuracy: ±0.2%F.S
◆Working pressure: > 2L/min 0-4 bar, <2L/min 0-6 bar, maximum pressure resistance 1MPaMain material: base: 316L stainless steel, shell: aluminum alloyAdvantages: high precision and small size, fast response speed, large range ratio, high resolution, and high cost performance.